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The ZnO films and ZnO films doped with Al were deposited on glass substrates by radio frequency magnetron sputtering at room temperature. Films were annealed in an electrical furnace with Ar atmosphere at three different temperatures 400, 500, and 600 ^oC. The values of optical density of ZnO films were greater than respect to ZnO films doped with Al. With increasing annealing temperature, the lateral size values of nanoparticles for ZnO films were increased. The ZnO films annealed at 400 ⁰C have minimum value of the nanoparticles lateral size in about of 22.59 nm.  The ZnO films doped with Al and annealed at 600 ⁰C have maximum value of the nanoparticles lateral size in about of 22.59 nm.  Changes in the height of the scanned surface of the layers indicated that the zinc oxide film has a sharp jump of 25nm at room temperature. Also, the ZnO films doped with aluminum at 600 °C have less ups and downs than other temperatures and the height is around 6 nm. With increasing the annealing temperature, the fractal dimensions’ values of the zinc oxide films were decreased.

Keywords: fractal dimension, structural properties, lateral size, optical density, bearing area.

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